MOMENTAN AUSVERKAUFT

Enabling Technologies for MEMS and Nanodevices von Jan G. Korvink (2013, Taschenbuch)

This edition of 'CMOS-MEMS' was originally published in the successful series 'Advanced Micro & Nanosystems'. A close look at enabling technologies is taken, the first section on MEMS featuring an introduction to the challenges and benefi ts of three-dimensional silicon processing. An insider's view of industrial MEMS commercialization is followed by chapters on capacitive interfaces for MEMS, packaging issues of micro- and nanosystems, MEMS contributions to high frequency integrated resonators and filters, and the uses of MEMS in mass data storage and electrochemical imaging by means of scanning micro- and nanoprobes. The second section on nanodevices first tackles the emerging topic of nanofluidics with a contribution each on simulation tools and on devices and uses, followed by another two on nanosensors featuring CNT sensors and CMOS-based DNA sensor arrays, respectively.

Herausgeber
Henry Baltes, Osamu Tabata, Oliver Brand, JAN G. Korvink, Gary K. Fedder, Christofer Hierold
ISBN-10
352733498x
ISBN-13
9783527334988
eBay Product ID (ePID)
165246316

Sprache
Englisch
Anzahl der Seiten
Xii Seiten
Verlag
Wiley Vch Verlag Gmbh, Wiley-Vch
Publikationsname
Enabling Technologies For Mems And Nanodevices
Autor
Henry Baltes, Jan G. Korvink, Osamu Tabata, Oliver Brand, Gary K. Fedder, Christofer Hierold
Format
Taschenbuch
Erscheinungsjahr
2013

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