15132-01 / ROBOT, WAFER MOVER, 3 AXIS, 1-0000-27 / BROOKS AUTOMATION
EUR 5.709,20
Robot
BG5-0855-000 / ROBOT ASSY, SCH THETA, 300MM / CANON
EUR 4.325,14
70031329 / I/O SIDE 1:1 LH WHITE OAK / BROOKS AUTOMATION
EUR 13.490,14
001-0000-27 (001-1070-02) / Z-BOT WAFER INDEXER / BROOKS AUTO
EUR 8.220,35