Reviews"...provides a state-of-the-art survey of this important technology, and it will be welcomed by researchers and students in surface engineering, materials science, electrical engineering, and related fields." (E-Streams Vol. 4, No. 3, March 2001)
Dewey Edition21
Table Of ContentIntroduction (J. Conrad). FUNDAMENTALS. Fundamentals of Plasmas and Sheaths (M. Lieberman). Ion Implantation and Thin-Film Deposition (M. Nastasi, et al.). Fundamentals of Plasma Immersion Ion Implantation and Deposition (B. Wood, et al.). Materials Characterization and Testing Methods-A Brief Survey (K. Walter, et al.). TECHNOLOGY. Design of a PIII&D Processing Chamber (J. Matossian, et al.). Plasma Sources (A. Anders, et al.). Pulser Technology (D. Goebel, et al.). Health and Safety Issues Related to PIII&D (D. Beals, et al.). APPLICATIONS. Nonsemiconductor Applications of PIII&D (K. Sridharan, et al.). Semiconductor Applications (P. Chu, et al.). Appendices. Index.
SynopsisThema dieses Buches sind verschiedene Plasmaverfahren zur gezielten Modifikation von Oberflachen und oberflachennahen Schichten fester Werkstoffe. Die Gemeinsamkeit der diskutierten Methoden besteht darin, da? das bearbeitete Werkstuck in ein Plasma eingebracht wird; den Ionen des Plasmas wird dabei die zur Implantation erforderliche kinetische Energie zugefuhrt. (09/00), This is the first book to describe a family of plasma techniques used to modify the surface and near-surface layer of solid materials., This fascinating new book takes a nostalgic look at Bingley and presents some of the changes that have taken place in the town during the last 150 years. Local author Dr Gary Firth has gathered together ninety pairs of images, many previously unpublished, to compare and contrast changing modes of fashion and transportation, shops and businesses, houses and public buildings, whilst recalling local people who once lived and worked in the historic market town. Bingley Past & Present is sure to bring back cherished memories of yesteryear for all who know and love this part of West Yorkshire.