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Product Identifiers
PublisherSpie
ISBN-101510680330
ISBN-139781510680333
eBay Product ID (ePID)10072898812
Product Key Features
Book TitleOptical Lithography for Advanced Semiconductor Patterning
Number of Pages1156 Pages
LanguageEnglish
TopicEngineering (General)
Publication Year2024
GenreTechnology & Engineering
AuthorPeter De Bisschop
FormatHardcover
Dimensions
Item Height1.9 in
Item Weight71.2 Oz
Item Length10.2 in
Item Width7.3 in
Additional Product Features
LCCN2024-026673
LC Classification NumberTK7871.85.D425 2024
