Bild 1 von 1
Galerie
Bild 1 von 1
Chemistry in Microelectroni
US $190,31
Ca.EUR 162,45
Artikelzustand:
Neu
Neues, ungelesenes, ungebrauchtes Buch in makellosem Zustand ohne fehlende oder beschädigte Seiten. Genauere Einzelheiten entnehmen Sie bitte dem Angebot des Verkäufers.
3 verfügbar
- Sofort-KaufenChemistry in Microelectronics by Yannick Le Tiec (English) Hardcover Book
Oops! Looks like we're having trouble connecting to our server.
Refresh your browser window to try again.
Versand:
Kostenlos Economy Shipping.
Standort: Fairfield, Ohio, USA
Lieferung:
Lieferung zwischen Mi, 8. Okt und Mi, 15. Okt nach 94104 bei heutigem Zahlungseingang
Rücknahme:
30 Tage Rückgabe. Käufer zahlt Rückversand. Wenn Sie ein eBay-Versandetikett verwenden, werden die Kosten dafür von Ihrer Rückerstattung abgezogen.
Zahlungen:
Sicher einkaufen
- Gratis Rückversand im Inland
- Punkte für jeden Kauf und Verkauf
- Exklusive Plus-Deals
Der Verkäufer ist für dieses Angebot verantwortlich.
eBay-Artikelnr.:388008908743
Artikelmerkmale
- Artikelzustand
- ISBN-13
- 9781848214361
- Book Title
- Chemistry in Microelectronics
- ISBN
- 9781848214361
Über dieses Produkt
Product Identifiers
Publisher
Wiley & Sons, Incorporated, John
ISBN-10
1848214367
ISBN-13
9781848214361
eBay Product ID (ePID)
150613315
Product Key Features
Number of Pages
384 Pages
Publication Name
Chemistry in Microelectronics
Language
English
Publication Year
2013
Subject
Electronics / Microelectronics, Electronics / General, Chemistry / General
Type
Textbook
Subject Area
Technology & Engineering, Science
Format
Hardcover
Dimensions
Item Height
1.1 in
Item Weight
25.2 Oz
Item Length
9.4 in
Item Width
6.4 in
Additional Product Features
Intended Audience
Scholarly & Professional
LCCN
2012-955113
Dewey Edition
23
Illustrated
Yes
Dewey Decimal
621.381
Table Of Content
Preface ix Chapter 1. Chemistry in the "Front End of the Line" (FEOL): Deposits, Gate Stacks, Epitaxy and Contacts 1 François MARTIN, Jean-Michel HARTMANN, Véronique CARRON and Yannick LE TIEC 1.1. Introduction 1 1.2. Arrangement of the gate 3 1.3. Chemistry of crystalline materials 19 1.4. Contact areas between the gate and the "source" and "drain" 38 1.5. General conclusion 57 1.6. List of Abbreviations 58 1.7. Bibliography 59 Chapter 2. Chemistry in Interconnects 81 Vincent JOUSSEAUME, Paul-Henri HAUMESSER, Carole PERNEL, Jeffery BUTTERBAUGH, Sylvain MAÎTREJEAN and Didier LOUIS 2.1. Introduction 81 2.2. Interconnects: generalities and background 83 2.3. Dielectric deposits 99 2.4. Deposition and properties of metal layers for interconnect structures 122 2.5. Cleaning process for copper interconnects 144 2.6. General conclusions and perspectives 161 2.7. List of Abbreviations 164 2.8. Bibliography 165 Chapter 3. The Chemistry of Wet Surface Preparation: Cleaning, Etching and Drying 187 Yannick LE TIEC and Martin KNOTTER 3.1. Introduction 187 3.2. Cleaning 188 3.3. Wet etching 202 3.4. Rinsing and drying 214 3.5. Conclusion 224 3.6. List of Abbreviations 225 3.7. Bibliography 225 Chapter 4. The Use and Management of Chemical Fluids in Microelectronics 233 Christiane GOTTSCHALK, Kevin MCLAUGHLIN, Julie CREN, Catherine PEYNE and Patrick VALENTI 4.1. Ultrapure water 233 4.2. Gases for semiconductors 251 4.3. Dissolved gases 268 4.4. High-purity chemicals 283 4.5. Waste management 290 4.6. List of Abbreviations 301 4.7. Bibliography 303 Chapter 5. Surface Functionalization for Micro- and Nanosystems: Application to Biosensors 309 Antoine HOANG, Gilles MARCHAND, Guillaume NONGLATON, Isabelle TEXIER-NOGUES and Francoise VINET 5.1. Introduction 309 5.2. Materials 310 5.3. Functionalization process 317 5.4. Molecule and macromolecule immobilization 332 5.5. Analytes capture 340 5.6. Conclusion 348 5.7. List of Abbreviations 349 5.8. Bibliography 349 List of Authors 361 Index 363
Synopsis
Microelectronics is a complex world where many sciences need to collaborate to create nano-objects: we need expertise in electronics, microelectronics, physics, optics and mechanics also crossing into chemistry, electrochemistry, as well as biology, biochemistry and medicine., Microelectronics is a complex world where many sciences need to collaborate to create nano-objects: we need expertise in electronics, microelectronics, physics, optics and mechanics also crossing into chemistry, electrochemistry, as well as biology, biochemistry and medicine. Chemistry is involved in many fields from materials, chemicals, gases, liquids or salts, the basics of reactions and equilibrium, to the optimized cleaning of surfaces and selective etching of specific layers. In addition, over recent decades, the size of the transistors has been drastically reduced while the functionality of circuits has increased. This book consists of five chapters covering the chemicals and sequences used in processing, from cleaning to etching, the role and impact of their purity, along with the materials used in "Front End Of the Line" which corresponds to the heart and performance of individual transistors, then moving on to the "Back End Of the Line" which is related to the interconnection of all the transistors. Finally, the need for specific functionalization also requires key knowledge on surface treatments and chemical management to allow new applications. Contents 1. Chemistry in the "Front End of the Line" (FEOL): Deposits, Gate Stacks, Epitaxy and Contacts, Fran ois Martin, Jean-Michel Hartmann, V ronique Carron and Yannick Le Tiec. 2. Chemistry in Interconnects, Vincent Jousseaume, Paul-Henri Haumesser, Carole Pernel, Jeffery Butterbaugh, Sylvain Ma trejean and Didier Louis. 3. The Chemistry of Wet Surface Preparation: Cleaning, Etching and Drying, Yannick Le Tiec and Martin Knotter. 4. The Use and Management of Chemical Fluids in Microelectronics, Christiane Gottschalk, Kevin Mclaughlin, Julie Cren, Catherine Peyne and Patrick Valenti. 5. Surface Functionalization for Micro- and Nanosystems: Application to Biosensors, Antoine Hoang, Gilles Marchand, Guillaume Nonglaton, Isabelle Texier-Nogues and Francoise Vinet. About the Authors Yannick Le Tiec is a technical expert at CEA-Leti, Minatec since 2002. He is a CEA-Leti assignee at IBM, Albany (NY) to develop the advanced 14 nm CMOS node and the FDSOI technology. He held different technical positions from the advanced 300 mm SOI CMOS pilot line to different assignments within SOITEC for advanced wafer development and later within INES to optimize solar cell ramp-up and yield. He has been part of the ITRS Front End technical working group at ITRS since 2008., Microelectronics is a complex world where many sciences need to collaborate to create nano-objects: we need expertise in electronics, microelectronics, physics, optics and mechanics also crossing into chemistry, electrochemistry, as well as biology, biochemistry and medicine. Chemistry is involved in many fields from materials, chemicals, gases, liquids or salts, the basics of reactions and equilibrium, to the optimized cleaning of surfaces and selective etching of specific layers. In addition, over recent decades, the size of the transistors has been drastically reduced while the functionality of circuits has increased. This book consists of five chapters covering the chemicals and sequences used in processing, from cleaning to etching, the role and impact of their purity, along with the materials used in "Front End Of the Line" which corresponds to the heart and performance of individual transistors, then moving on to the "Back End Of the Line" which is related to the interconnection of all the transistors. Finally, the need for specific functionalization also requires key knowledge on surface treatments and chemical management to allow new applications. Contents 1. Chemistry in the "Front End of the Line" (FEOL): Deposits, Gate Stacks, Epitaxy and Contacts, François Martin, Jean-Michel Hartmann, Véronique Carron and Yannick Le Tiec. 2. Chemistry in Interconnects, Vincent Jousseaume, Paul-Henri Haumesser, Carole Pernel, Jeffery Butterbaugh, Sylvain Maîtrejean and Didier Louis. 3. The Chemistry of Wet Surface Preparation: Cleaning, Etching and Drying, Yannick Le Tiec and Martin Knotter. 4. The Use and Management of Chemical Fluids in Microelectronics, Christiane Gottschalk, Kevin Mclaughlin, Julie Cren, Catherine Peyne and Patrick Valenti. 5. Surface Functionalization for Micro- and Nanosystems: Application to Biosensors, Antoine Hoang, Gilles Marchand, Guillaume Nonglaton, Isabelle Texier-Nogues and Francoise Vinet. About the Authors Yannick Le Tiec is a technical expert at CEA-Leti, Minatec since 2002. He is a CEA-Leti assignee at IBM, Albany (NY) to develop the advanced 14 nm CMOS node and the FDSOI technology. He held different technical positions from the advanced 300 mm SOI CMOS pilot line to different assignments within SOITEC for advanced wafer development and later within INES to optimize solar cell ramp-up and yield. He has been part of the ITRS Front End technical working group at ITRS since 2008.
LC Classification Number
TK7874.C52225 2013
Artikelbeschreibung des Verkäufers
Rechtliche Informationen des Verkäufers
Info zu diesem Verkäufer
grandeagleretail
98,6% positive Bewertungen•2,8 Mio. Artikel verkauft
Angemeldet als gewerblicher Verkäufer
Verkäuferbewertungen (1.064.845)
- c***a (121)- Bewertung vom Käufer.Letzte 6 MonateBestätigter KaufThe seller was very responsive and answered me on a timely matter. The product itself came in its packaging and was new, not used at all. The packaging was not beat up or anything, safely delivered to my mailbox. No mix ups and zero stress with delivery. The price for the product is completely understandable for the product. I really appreciate the seller and I am very happy to have purchased through this seller. Completely trustable!
- m***4 (1612)- Bewertung vom Käufer.Letzte 6 MonateBestätigter KaufLeaving positive feedback because 1) item was packed well & arrived as described 2) seller did give partial refund when subsequent price dropped below org purchase price. 3) communication was quick However, there was a downside to this transaction -item listed as in-stock but ended up waiting nearly a month for them to get it from their distributer then ship it to me (bought June 29th, arrived around July 21). Auction said 12-15 days. Better clarity would have prevented lot of frustrationStreet Fighter II - Guile (Player 2) Figure - 6 Inch (Nr. 365698737394)
- w***i (882)- Bewertung vom Käufer.Letzte 6 MonateBestätigter KaufAbsolutely Wonderful Seller!! Terrific Item As Described!!! Great Service and Communication!! Shipped In Waterproof Packaging!! I Received Item In About One Week!! Very Pleased With Seller! I Will Buy From This Seller Again!!
Noch mehr entdecken:
- Nachschlagewerke und Lexikons auf English,
- Penguin Books Sprachkurse und Lehrmaterialien,
- Penguin Books Studium und Erwachsenenbildung,
- Penguin Books Fachbücher, Lernen und Nachschlagen,
- Englische Studium und Erwachsenenbildung Penguin Books,
- John-Le-Carré-Belletristik - Bücher,
- Romane John-Le-Carré-Belletristik,
- Ursula-K. - Le-Guin-Belletristik-Bücher,
- Englische Bücher John-Le-Carré-Belletristik,
- John-Le-Carré-Taschenbuch - Belletristik-Bücher
grandeagleretail
98,6% positive Bewertungen•2,8 Mio. Artikel verkauft
Angemeldet als gewerblicher Verkäufer
Verkäuferbewertungen (1.064.845)
- c***a (121)- Bewertung vom Käufer.Letzte 6 MonateBestätigter KaufThe seller was very responsive and answered me on a timely matter. The product itself came in its packaging and was new, not used at all. The packaging was not beat up or anything, safely delivered to my mailbox. No mix ups and zero stress with delivery. The price for the product is completely understandable for the product. I really appreciate the seller and I am very happy to have purchased through this seller. Completely trustable!
- m***4 (1612)- Bewertung vom Käufer.Letzte 6 MonateBestätigter KaufLeaving positive feedback because 1) item was packed well & arrived as described 2) seller did give partial refund when subsequent price dropped below org purchase price. 3) communication was quick However, there was a downside to this transaction -item listed as in-stock but ended up waiting nearly a month for them to get it from their distributer then ship it to me (bought June 29th, arrived around July 21). Auction said 12-15 days. Better clarity would have prevented lot of frustrationStreet Fighter II - Guile (Player 2) Figure - 6 Inch (Nr. 365698737394)
- w***i (882)- Bewertung vom Käufer.Letzte 6 MonateBestätigter KaufAbsolutely Wonderful Seller!! Terrific Item As Described!!! Great Service and Communication!! Shipped In Waterproof Packaging!! I Received Item In About One Week!! Very Pleased With Seller! I Will Buy From This Seller Again!!